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UHP Gate Valve Door™

UHP Gate Valve Door

Ultra-High Purity (UHP) Bonded Door For Original Equipment and Aftermarket Replacement

Gate valve doors used in semiconductor manufacturing operations must be replaced frequently due to particle generation caused by mechanical wear, chemical attack and thermal cycling. The UHP Gate Valve Door is designed to provide OEMs and chip fabricators with an original and/or replacement door option that reduces process contamination and increases wafer yield.

Advanced Bonding Technology

Parker employs advanced bonding technology in the
manufacture of the UHP Gate Valve Door. The superior stability of the bond between door and sealing element provides improved abrasion resistance and seal integrity, resulting in extremely low particle generation and dramatically increased seal service life.

Clean  From Production to Installation

To guard against contamination and ensure product quality, the UHP Gate Valve Door is processed and packaged in an ultra-high purity manufacturing cell. All work in this cell is closely monitored through a batch traceable statistical process control program.
    Features and Benefits
  • Abrasion-resistant seal material reduces mechanical wear
  • Advanced bonding technology dramatically reduces particle generation (up to 4X reduction)
  • Ultra-high purity processing and packaging eliminates contamination
  • Superior chemical and temperature resistance results in increased seal life
Parker's UHP Gate Valve Door bonding technology
Parker's UHP Gate Valve Door bonding technology and advanced perfluroelastomer materials reduced potential for contribution by up to 4x in a typical CVD process
Parofluor™ Series Materials

Parofluor™ Series Materials

UHP Gate Valve Doors can be manufactured with a wide variety of fluorocarbon materials, as well as Parker s Parofluor Series Advanced Perfluorinated Elastomers. Parofluor materials offer a choice of performance levels for every application. Their broad chemical resistance, high temperature resistance (up to 320°C/608°F for Parofluor ULTRATM compounds) and ultra-high purity can help reduce downtime, increase productivity and improve safety.