| UHP
Gate Valve Door™
Ultra-High
Purity (UHP) Bonded Door For Original Equipment and Aftermarket
Replacement
Gate valve doors used in semiconductor manufacturing operations
must be replaced frequently due to particle generation caused by
mechanical wear, chemical attack and thermal cycling. The UHP Gate
Valve Door is designed to provide OEMs and chip fabricators with
an original and/or replacement door option that reduces process
contamination and increases wafer yield.
Advanced
Bonding Technology
Parker employs advanced bonding technology in the
 manufacture
of the UHP Gate Valve Door. The superior stability of the bond between
door and sealing element provides improved abrasion resistance and
seal integrity, resulting in extremely low particle generation and
dramatically increased seal service life.
Clean
— From Production to Installation
To guard against contamination and ensure product quality, the
UHP Gate Valve Door is processed and packaged in an ultra-high
purity
manufacturing cell. All work in this cell is closely monitored
through a batch traceable statistical process control program.
Features
and Benefits
- Abrasion-resistant
seal material reduces mechanical wear
- Advanced
bonding technology dramatically reduces particle generation (up
to 4X reduction)
- Ultra-high
purity processing and packaging eliminates contamination
- Superior
chemical and temperature resistance results in increased seal
life
Parofluor™
Series Materials
UHP Gate Valve Doors can be manufactured with a wide variety of
fluorocarbon materials, as well as Parker’s Parofluor Series Advanced
Perfluorinated Elastomers. Parofluor materials offer a choice of
performance levels for every application. Their broad chemical resistance,
high temperature resistance (up to 320°C/608°F for Parofluor ULTRATM
compounds) and ultra-high purity can help reduce downtime, increase
productivity and improve safety. |
